File:36 nm pitch stochastic failures.png
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[edit]Description36 nm pitch stochastic failures.png |
English: 36 nm pitch lines and spaces may show bridging or breaking failures. Bridging is more likely for small trenches (spaces) while breaking is more likely for smaller lines separating the trenches. Ref.: P. De Bisschop and E. Hendrickx, Proc. SPIE 10583, 105831K (2018). |
Date | |
Source | Public domain drawing from https://www.semiconkorea.org/en/sites/semiconkorea.org/files/data15/docs/3_An%20Steegen_imec.pdf |
Author | An Steegen (IMEC) |
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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[edit]Transferred from en.wikipedia to Commons using For the Common Good.
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21:42, 31 July 2018 | 480 × 290 (9,401 bytes) | w:en:Guiding light (talk | contribs) | |
13:05, 31 July 2018 | 479 × 290 (8,501 bytes) | w:en:Guiding light (talk | contribs) | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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current | 12:07, 22 October 2018 | 1,248 × 595 (228 KB) | Guiding light (talk | contribs) | Replaced with new public drawing | |
03:37, 19 October 2018 | 480 × 290 (9 KB) | OgreBot (talk | contribs) | (BOT): Reverting to most recent version before archival | ||
03:37, 19 October 2018 | 479 × 290 (8 KB) | OgreBot (talk | contribs) | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-07-31 13:05:36 by Guiding light | ||
06:17, 18 October 2018 | 480 × 290 (9 KB) | Ajpolino (talk | contribs) | Transferred from en.wikipedia: see original upload log above |
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