File:Contact hole optimum EUV illumination vs pitch.png
Jump to navigation
Jump to search
No higher resolution available.
Contact_hole_optimum_EUV_illumination_vs_pitch.png (481 × 290 pixels, file size: 9 KB, MIME type: image/png)
Captions
Captions
Add a one-line explanation of what this file represents
Summary
[edit]
| Description |
English: The optimum EUV illumination (quasar inner and outer sigma) is plotted as a function of contact hole pitch, with the half-pitch (hp) in units of k1 (=hp*NA/wavelength). Both 0.25 NA (26 nm and 28 nm half-pitches) and 0.33 NA (22 nm half-pitch) included. For larger pitches, conventional or annular illumination would be used. Layouts incorporating a wide range of pitches would require different illuminations for different densities within the layout, entailing separate exposures. Refs.: M. D. Smith et al., Proc. SPIE 8682, 868203 (2013); Y-S. Yen et al., Proc. SPIE 4691, 1530 (2002); S-Y. Oh et al., Proc. SPIE 4691 (2002). |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
Licensing
[edit]
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
|
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
Attribution: Guiding light at English Wikipedia
- You are free:
- to share – to copy, distribute and transmit the work
- to remix – to adapt the work
- Under the following conditions:
- attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.
Original upload log
[edit]
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-01-02 06:15:08 | 481 × 290 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
|
This media file is uncategorized.
Please help improve this media file by adding it to one or more categories, so it may be associated with related media files (how?), and so that it can be more easily found.
Please notify the uploader with {{subst:Please link images|File:Contact hole optimum EUV illumination vs pitch.png}} ~~~~ |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:29, 20 August 2019 | | 481 × 290 (9 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
You cannot overwrite this file.
File usage on Commons
There are no pages that use this file.
