File:EUV SRAF Stochastic Printing.png

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EUV_SRAF_Stochastic_Printing.png (681 × 324 pixels, file size: 18 KB, MIME type: image/png)

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Description
English: The +6 sigma dose variation at the location of a sub-resolution assist feature (SRAF) can cause local dose to go above the threshold to print. Threshold dose is 80 mJ/cm2. Image averaged over 2 nm x 2 nm. Ref.: https://www.linkedin.com/pulse/stochastic-printing-sub-resolution-assist-features-frederick-chen/
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This diagram was created with Microsoft Excel.
Author Guiding light
This graph image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with {{vector version available|new image name}}.


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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2019-03-02 00:20:16 681 × 324 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current16:23, 20 August 2019Thumbnail for version as of 16:23, 20 August 2019681 × 324 (18 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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