File:EUV SRAF Stochastic Printing.png
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EUV_SRAF_Stochastic_Printing.png (681 × 324 pixels, file size: 18 KB, MIME type: image/png)
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Summary
[edit]DescriptionEUV SRAF Stochastic Printing.png |
English: The +6 sigma dose variation at the location of a sub-resolution assist feature (SRAF) can cause local dose to go above the threshold to print. Threshold dose is 80 mJ/cm2. Image averaged over 2 nm x 2 nm. Ref.: https://www.linkedin.com/pulse/stochastic-printing-sub-resolution-assist-features-frederick-chen/ |
Date | |
Source |
This diagram was created with Microsoft Excel. |
Author | Guiding light |
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[edit]Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.http://www.gnu.org/copyleft/fdl.htmlGFDLGNU Free Documentation Licensetruetrue |
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[edit]The original description page was here. All following user names refer to en.wikipedia.
Date/Time | Dimensions | User | Comment |
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2019-03-02 00:20:16 | 681 × 324 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 16:23, 20 August 2019 | 681 × 324 (18 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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Horizontal resolution | 56.69 dpc |
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Vertical resolution | 56.69 dpc |