File:EUV T2T aerial image.png

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EUV_T2T_aerial_image.png (478 × 301 pixels, file size: 12 KB, MIME type: image/png)

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v== Summary ==

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English: This is an illustration of the tip-to-tip imaging by conventional EUV lithography. With off-axis (dipole, quadrupole) illumination required for the dense linewidth, the gap between line-end tips is especially difficult to optimize.[1] The gaps are generally imaged by conventional instead of off-axis illumination,[2] though off-axis components are generally included. The light intensity is difficult to reduce in a region which is illuminated for maximum line intensity. Specifically, the gaps in the line-space pattern have relatively low weight of its diffraction pattern compared to that of the line-space pattern itself, leading to the potential for sidelobes in targeted dark areas.[3] Targeting a smaller gap results in vanishing dose tolerance.
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Author Guiding light
  1. ↑ E. van Setten et al., Proc. SPIE 9661, 96610G (2015).
  2. ↑ J. van Schoot et al., Proc. SPIE 9422, 94221F (2015).
  3. ↑ B. W. Smith, J. Microlith., Microfab., Microsyst. 1, 95 (2002).
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2018-08-06 21:58:04 478 × 301 Guiding light
2018-08-04 13:02:22 477 × 294 Guiding light
2018-08-04 08:54:57 481 × 293 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current21:30, 20 August 2019Thumbnail for version as of 21:30, 20 August 2019478 × 301 (12 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
21:30, 20 August 2019Thumbnail for version as of 21:30, 20 August 2019477 × 294 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-08-04 13:02:22 by Guiding light
21:30, 20 August 2019Thumbnail for version as of 21:30, 20 August 2019481 × 293 (10 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-08-04 08:54:57 by Guiding light
16:30, 20 August 2019Thumbnail for version as of 16:30, 20 August 2019478 × 301 (12 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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