File:EUV defocus pattern shift vs pitch.png

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EUV_defocus_pattern_shift_vs_pitch.png (685 × 306 pixels, file size: 15 KB, MIME type: image/png)

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English: The pattern shift through defocus varies as a function of pitch over the 20-100 nm range, which is a significant lithographic limitation even at loose pitches. The EUV illumination condition is 0.2/0.9 inner/outer Quasar 45 degrees. A standard EUV mask is assumed. The effect is due to apodization leading to intensity imbalance between the diffraction orders. Increasing the NA with anamorphic optics does not eliminate the effect, but only shifts the pitch dependence. Ref.: K. Vu Luong et al., "Modeling EUV mask using alternative materials for Mask3D effect compensation," Intl. Symp. EUV Lithography, October 2015
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This diagram was created with Microsoft Excel.
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-05-13 01:54:47 685 × 306 Guiding light
2017-05-11 02:52:34 671 × 288 Guiding light
2017-05-11 02:44:10 672 × 288 Guiding light
2017-05-11 02:00:15 672 × 288 Guiding light Added high NA curve
2017-05-09 03:18:43 672 × 288 Guiding light
2017-05-08 02:03:16 672 × 288 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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Date/TimeThumbnailDimensionsUserComment
current21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019685 × 306 (15 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019671 × 288 (14 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-11 02:52:34 by Guiding light
21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019672 × 288 (16 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-11 02:44:10 by Guiding light
21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019672 × 288 (14 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-11 02:00:15 by Guiding light
21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019672 × 288 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-09 03:18:43 by Guiding light
21:33, 20 August 2019Thumbnail for version as of 21:33, 20 August 2019672 × 288 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-05-08 02:03:16 by Guiding light
16:23, 20 August 2019Thumbnail for version as of 16:23, 20 August 2019685 × 306 (15 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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