File:Immersion tool throughput.png

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Immersion_tool_throughput.png (479 × 288 pixels, file size: 7 KB, MIME type: image/png)

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English: The throughput of early and later generation immersion tools is plotted as a function of dose, assuming a fixed slit width. Higher power enables higher throughput by allowing higher stage speeds. References: M. A. van den Brink et al., Proc. SPIE 2726, 734 (1996); NXT:1980Di; I. Bouchoms et al., Proc. SPIE 8326, 83260L (2012); J. de Klerk et al., Proc. SPIE 6520, 65201Y (2007); Cymer 2008 Annual Report; Cymer 120W ArFi source
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Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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2018-07-16 16:44:01 479 × 288 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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current16:26, 20 August 2019Thumbnail for version as of 16:26, 20 August 2019479 × 288 (7 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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