File:LELE+SID+block.png

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LELE+SID+block.png (481 × 262 pixels, file size: 5 KB, MIME type: image/png)

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Description
English: Example of LELE+SID+block patterning combined effectively improves pitch resolution 3x. References: US Patent 7846849; Y. Ban and D. Z. Pan, J. Micro/Nanolith. MEMS MOEMS 14, 011004 (2015).
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Source
 
This diagram was created with Microsoft Excel.
Author Guiding light

Licensing

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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Original upload log

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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-03-11 10:46:43 481 × 262 Guiding light spacer is labeled
2017-03-11 10:34:18 479 × 262 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

File history

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Date/TimeThumbnailDimensionsUserComment
current21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019481 × 262 (5 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
21:26, 20 August 2019Thumbnail for version as of 21:26, 20 August 2019479 × 262 (5 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-03-11 10:34:18 by Guiding light
16:29, 20 August 2019Thumbnail for version as of 16:29, 20 August 2019481 × 262 (5 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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