File:Line T2T vs half-pitch (EUV).png

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Line_T2T_vs_half-pitch_(EUV).png (481 × 288 pixels, file size: 10 KB, MIME type: image/png)

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Description
English: The smallest published T2T is plotted vs. half pitch. EUV OPC is applied where possible to reduce the tip-to-tip distance. The dotted line indicates the half-pitch. Thus, tip-to-tip distance generally exceeds the half-pitch except for the very largest half-pitch shown (32 nm). Refs.: (except SMO) E. van Setten et al., Intl. Symp. on EUV Lithography, 2014, and E. van Setten et al., Proc. SPIE 9231, 923108 (2014); (SMO) V. M. Blanco Carballo et al., Proc. SPIE 10143, 1014318 (2017).
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This diagram was created with Microsoft Excel.
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2017-07-04 12:34:04 481 × 288 Guiding light
2017-07-04 12:13:36 481 × 288 Guiding light more cases
2017-07-04 12:07:26 481 × 288 Guiding light
2017-07-03 14:40:39 481 × 288 Guiding light
2017-07-03 12:29:45 481 × 288 Guiding light
2017-07-03 12:21:14 481 × 288 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
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File history

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Date/TimeThumbnailDimensionsUserComment
current21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (10 KB)OgreBot (talk | contribs)(BOT): Reverting to most recent version before archival
21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (11 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-04 12:13:36 by Guiding light
21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-04 12:07:26 by Guiding light
21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 14:40:39 by Guiding light
21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (9 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 12:29:45 by Guiding light
21:25, 20 August 2019Thumbnail for version as of 21:25, 20 August 2019481 × 288 (8 KB)OgreBot (talk | contribs)(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2017-07-03 12:21:14 by Guiding light
16:30, 20 August 2019Thumbnail for version as of 16:30, 20 August 2019481 × 288 (10 KB)Dave louis john (talk | contribs)Transferred from en.wikipedia (MTC!) (1.1.0)

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