File:Order of features in spacer patterning of posts.png
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Order_of_features_in_spacer_patterning_of_posts.png (439 × 437 pixels, file size: 3 KB, MIME type: image/png)
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| Description |
English: Iterative spacer patterning can form portions of arrays of posts or pillars (S. Yamauchi et al., Proc. SPIE 8325, 832526 (2012)). In the above, the blue features are the core or mandrel features, followed by the red features formed in the first spacer gaps (centered between 4 blue features, some not shown), then the green features in the second spacer gaps (centered between two blue and two red features). Large blocks of material outside the final spacer can be removed by isotropic etch (US Patent 6632741). |
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| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
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| 2018-02-05 13:16:29 | 439 × 437 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
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| current | 16:25, 20 August 2019 | | 439 × 437 (3 KB) | Dave louis john (talk | contribs) | Transferred from en.wikipedia (MTC!) (1.1.0) |
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