File:Reflectivity angular spectrum at different wavelengths.png

From Wikimedia Commons, the free media repository
Jump to navigation Jump to search

Reflectivity_angular_spectrum_at_different_wavelengths.png (568 × 311 pixels, file size: 28 KB, MIME type: image/png)

Captions

Captions

Multilayer reflectance of EUV light at different wavelengths, as a function of incident angle.


Summary

[edit]
Description
English:
When only a narrow range of EUV wavelengths is considered (e.g., above center), it may give a false appearance of reflectance uniformity across angles.
The measured EUV multilayer reflectance is shown above as a function of incident angle for 13.3-13.7 nm wavelength range.[1] ASML's NXE EUV tool's broadband spectrum reflectance is also shown as the dashed curve.[2] The incident angle is defined with respect to the normal to the multilayer surface. The EUV source output is mostly concentrated between 13.3 nm and 13.7 nm.[3] The reflectance integrated over the range of angles is also comparable for the wavelengths of this range, but the dropoff for larger angles is faster for the longer wavelengths.[1] This trend is expected from the condition of Bragg's law.[4][5] A change in the cosine of the incident angle on the order of 1/(# of layer periods) ~2-3% is sufficient to reduce the wavelength's reflectance significantly.[6][7]
Inset: the impact of the angular dependence of reflectance on the wavelength distribution in the pupil, also known as apodization. The longest wavelengths are brighter at smaller angles, while the shortest wavelengths are brighter at larger angles. [8]
Multilayer reflectance in wavelength-angle space. The multilayer reflectance is maximized at the greenish region, falling off gradually in both angle and wavelength (in nm).
Date
Source
 
This diagram was created with Microsoft Excel.
Author Guiding light
This graph image could be re-created using vector graphics as an SVG file. This has several advantages; see Commons:Media for cleanup for more information. If an SVG form of this image is available, please upload it and afterwards replace this template with {{vector version available|new image name}}.


It is recommended to name the SVG file “Reflectivity angular spectrum at different wavelengths.svg”—then the template Vector version available (or Vva) does not need the new image name parameter.

Licensing

[edit]
I, the copyright holder of this work, hereby publish it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.

References

[edit]
  1. ↑ a b http://www.eecs.berkeley.edu/Pubs/TechRpts/2013/EECS-2013-56.html R. Chao et al., Measurement and characterization of EUV mask performance at high-NA, EECS Department, Univ. of California, Berkeley Technical Report No. UCB/EECS-2013-56, 5/10/2013, Figure 5.
  2. ↑ N. Davydova et al., Proc. SPIE 8352, 835208 (2012).
  3. ↑ I. Fomenkov et al., Adv. Opt. Techn. 6, 173 (2017).
  4. ↑ F. Scholze et al., Proc. SPIE 6151, 615137 (2006).
  5. ↑ The Very Different Wavelengths of EUV Lithography
  6. ↑ D. Attwood, Soft X-rays and Extreme Ultraviolet Radiation: Principles and Applications, Cambridge University Press, 2000, Ch. 5.
  7. ↑ B. E. A. Salah and M. C. Teich, Fundamentals of Photonics, Wiley, 1991, p. 805ff.
  8. ↑ J. Ruoff, Proc. SPIE 7823, 78231N (2010).

File history

Click on a date/time to view the file as it appeared at that time.

(newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)
Date/TimeThumbnailDimensionsUserComment
current12:25, 20 August 2019Thumbnail for version as of 12:25, 20 August 2019568 × 311 (28 KB)Guiding light (talk | contribs)larger fonts
12:22, 20 August 2019Thumbnail for version as of 12:22, 20 August 2019568 × 311 (27 KB)Guiding light (talk | contribs)clearer labels of shortest and longest wavelength zones
12:35, 19 August 2019Thumbnail for version as of 12:35, 19 August 2019569 × 311 (26 KB)Guiding light (talk | contribs)Added inset for wavelength distribution in pupil
15:32, 31 July 2019Thumbnail for version as of 15:32, 31 July 2019569 × 311 (26 KB)Guiding light (talk | contribs)enlarged graph
14:56, 31 July 2019Thumbnail for version as of 14:56, 31 July 2019566 × 309 (20 KB)Guiding light (talk | contribs)The actual spectrum's reflectance is added as dashed curve.
06:28, 20 July 2019Thumbnail for version as of 06:28, 20 July 2019762 × 454 (97 KB)Guiding light (talk | contribs)Remove inset
06:23, 20 July 2019Thumbnail for version as of 06:23, 20 July 2019761 × 454 (110 KB)Guiding light (talk | contribs)Show individual wavelengths only; effective illumination for 13.55 nm only.
14:46, 19 July 2019Thumbnail for version as of 14:46, 19 July 2019711 × 422 (97 KB)Guiding light (talk | contribs)weighted average corrected
20:17, 18 July 2019Thumbnail for version as of 20:17, 18 July 2019746 × 446 (109 KB)Guiding light (talk | contribs)"weighted average" changed to "weighted sum" the correct term
11:58, 18 July 2019Thumbnail for version as of 11:58, 18 July 2019758 × 452 (110 KB)Guiding light (talk | contribs)corrected weighted average
(newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)

You cannot overwrite this file.

There are no pages that use this file.

Metadata

This file contains additional information such as Exif metadata which may have been added by the digital camera, scanner, or software program used to create or digitize it. If the file has been modified from its original state, some details such as the timestamp may not fully reflect those of the original file. The timestamp is only as accurate as the clock in the camera, and it may be completely wrong.

Retrieved from "https://commons.wikimedia.org/w/index.php?title=File:Reflectivity_angular_spectrum_at_different_wavelengths.png&oldid=859148804"